Properties of TiC Coating by Pulsed DC PACVD
نویسندگان
چکیده
منابع مشابه
COMPARISON OF PROPERTIES OF TiN/TiCN AND PLASMA NITRIDING/TiCN FILMS DEPOSITED ON THE TOOL STEEL BY PULSED DC- PACVD
In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coating. The composition, crystalline structure and phase of the films were investigated by X-ray d...
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ژورنال
عنوان ژورنال: Journal of Coatings
سال: 2013
ISSN: 2314-6508
DOI: 10.1155/2013/712812